THERMAL EVAPORATION SYSTEM
Centre of Excellence (COE)

 

 

Description of the facility:

The HHV Thermal Evaporation System is a versatile and compact coating system which has been developed to meet the demands of the researcher.

The system is available with glass bell jar. The vacuum system is controlled and monitored by a rugged PLC with touch screen for easy operation. Pumping options include diffusion, turbo and cryo pumps with oil-sealed or dry scroll backing pumps.

Features :

Vacuum systems

600l/s diffusion pump, 14.3m3/h oil sealed rotary pump and liquid nitrogen trap as standard.

Chambers

Domed glass bell jar, Controls and safety

PLC system controller with touch-screen for vacuum system control, Automatic high vacuum valve protects pumps and process, Comprehensive interlocks to maximize operator safety

Accessories

EB3 compact 3kW, four-pocket electron beam source, Temperature controlled sources for organic electronic materials

Resistance evaporation systems

Static work holders Substrate heating systems

Source shutters Glow discharge cleaning

Film thickness monitoring

Deposited metals : Gold and aluminum

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